Publication
IEDM 2022
Invited talk

Hardware Based Performance Assessment of Vertical-Transport Nanosheet Technology

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Abstract

Vertical-transport FET (VTFET) has its advantage on area scaling, which enables to scale logic area beyond sub-45nm contacted gate pitch (CGP). This paper focuses on VTFET performance assessment. 1.2x effective capacitance contrasting to technology target is demonstrated based on 40CGP VTFET ring oscillator. 90% DC performance is demonstrated as well.