Two gates are better than one

A planar, triple-self-aligned, double-gate GET process is implemented where a unique sidewall source/drain structure permits self-aligned patterning of the back-gate layer after the source/drain (S/D) structure is in place. This allows coupling the silicon thickness control inherent in a planar, unpatterned layer with VLSI self-alignment techniques and also gives independently controlled front and back gates. Moreover, double-gate FET (DGFET) operation is demonstrated with good transport at both interfaces.