Publications

4 results for R.M. Sicina

Performance dependence of CMOS on silicon substrate orientation for ultrathin oxynitride and HfO₂ gate dielectrics
- - Min Yang
  - Evgeni P. Gusev
  - et al.
- 2003
- IEEE Electron Device Letters
Two gates are better than one
- - P. Solomon
  - K.W. Guarini
  - et al.
- 2003
- IEEE Circuits and Devices Magazine
Triple-self-aligned, planar double-gate MOSFETs: Devices and circuits
- - K.W. Guarini
  - P. Solomon
  - et al.
- 2001
- Technical Digest-International Electron Devices Meeting
Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- - S.J. Wind
  - Y. Taur
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures