Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

8 results for Allen Gabor

High performance 14nm SOI FinFET CMOS technology with 0.0174μm² embedded DRAM and 15 levels of Cu metallization
- - C.-H.C-H. Lin
  - B. Greene
  - et al.
- 2014
- IEDM 2014
Predicting overlay mark performance based on process emulation and optical simulation
- - Sagarika Mukesh
  - Jack Wong
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Effect of high NA "half-field" printing on overlay error
- - Allen Gabor
  - Martin Burkhardt
  - et al.
- 2021
- SPIE Advanced Lithography 2021
EUV single exposure via patterning at aggressive pitch
- - Jing Guo
  - Jennifer Church
  - et al.
- 2021
- SPIE Advanced Lithography 2021
Bayesian dropout approximation in deep learning neural networks: Analysis of self-aligned quadruple patterning
- - Scott D. Halle
  - Max O. Bloomfield
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Characterization of EUV image fading induced by overlay corrections using pattern shift response metrology
- - Daniel Schmidt
  - Roger Cornell
  - et al.
- 2019
- EUVL 2019
Mix-and-match considerations for EUV insertion in N7 HVM
- - Xuemei Chen
  - Allen Gabor
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Overlay error statistics for multiple-exposure patterning
- - Allen Gabor
  - Nelson Felix
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS