Publications

109 results for Sebastian Engelmann

An integrated silicon photonics technology for O-band datacom
- - N. Feilchenfeld
  - Frederick A. Anderson
  - et al.
- 2015
- IEDM 2015
Strained SiGe on insulator FinFETs: A P-FET candidate for 10nm node (Invited)
- - Pouya Hashemi
  - Karthik Balakrishnan
  - et al.
- 2014
- ECSSMEQ 2014
Assembly of mechanically compliant interfaces between optical fibers and nanophotonic chips
- - Tymon Barwicz
  - Yoichi Taira
  - et al.
- 2014
- ECTC 2014
Strained Si_1-xGe_x-on-insulator PMOS FinFETs with excellent sub-threshold leakage, extremely-high short-channel performance and source injection velocity for 10nm node and beyond
- - Pouya Hashemi
  - Karthik Balakrishnan
  - et al.
- 2014
- VLSI Technology 2014
Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication
- - Hsinyu Tsai
  - Jed W. Pitera
  - et al.
- 2014
- ACS Nano
Contamination mitigation of hydrogen silsesquioxane resist processed with Na⁺-containing developer for nanoscale CMOS device patterning
- - Markus Brink
  - Isaac Lauer
  - et al.
- 2014
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Dopant-segregation technique for leakage reduction and performance improvement in trigate transistors without raised source/drain epitaxy
- - Fei Liu
  - Zhen Zhang
  - et al.
- 2014
- IEEE Electron Device Letters
Fluorocarbon assisted atomic layer etching of SiO₂ using cyclic Ar/C₄F₈ plasma
- - Dominik Metzler
  - Robert L. Bruce
  - et al.
- 2013
- JVSTA
Density scaling with gate-all-around silicon nanowire MOSFETs for the 10 nm node and beyond
- - Sarunya Bangsaruntip
  - K. Balakrishnan
  - et al.
- 2013
- IEDM 2013
Subtractive W contact and local interconnect co-integration (CLIC)
- - Fei Liu
  - Benjamin Fletcher
  - et al.
- 2013
- IITC 2013