Publications

109 results for Sebastian Engelmann

Plasma Processing and the Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- - Eric A. Joseph
  - Brooke Tvermoes
  - et al.
- 2024
- CMC Conference 2024
The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions
- - Jonathan Tennyson
  - Sebastian Mohr
  - et al.
- 2022
- Plasma Sources Science and Technology
Study of surface interactions for encapsulation of phase change memory materials
- - L. Buzi
  - D. Koty
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
- - John M. Papalia
  - Devi Koty
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Photonic Metacrystal: Design and Experimental Results
- - S. Hu
  - Marwan H. Khater
  - et al.
- 2022
- CLEO 2022
Towards Enhanced Sustainability in Future Plasma Processes
- - Nathan Marchack
  - Hiro Miyazoe
  - et al.
- 2022
- MRS Spring Meeting 2022
Etch and Patterning Development for 2nm Node Nanosheet Devices
- - Eric Miller
  - Indira Seshadri
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Photonic metacrystal: Design methodology and experimental characterization
- - S. Hu
  - Marwan H. Khater
  - et al.
- 2022
- Optics Express
Plasma processing for advanced microelectronics beyond CMOS
- - Nathan Marchack
  - L. Buzi
  - et al.
- 2021
- Journal of Applied Physics
Resistive Memory Process Optimization for High Resistance Switching Toward Scalable Analog Compute Technology for Deep Learning
- - Youngseok Kim
  - Soon-Cheon Seo
  - et al.
- 2021
- IEEE Electron Device Letters