Publications

109 results for Sebastian Engelmann

Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- - Nathan Marchack
  - Marwan Khater
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Electron beam generated plasmas: Characteristics and etching of silicon nitride
- - S. G. Walton
  - D. R. Boris
  - et al.
- 2017
- Microelectronic Engineering
Ge-on-insulator lateral bipolar transistors
- - Jeng-Bang Yau
  - Joonah Yoon
  - et al.
- 2016
- BCTM 2016
A novel approach to photonic packaging leveraging existing high-throughput microelectronic facilities
- - Tymon Barwicz
  - Yoichi Taira
  - et al.
- 2016
- IEEE JSTQE
Prospects of high-Ge-content strained SiGe for advanced FinFET generations
- - Pouya Hashemi
  - Karthik Balakrishnan
  - et al.
- 2016
- PRiME/ECS Meeting 2016
Replacement high-K/metal-gate High-Ge-content strained SiGe FinFETs with high hole mobility and excellent SS and reliability at aggressive EOT ∼7Å and scaled dimensions down to sub-4nm fin widths
- - Pouya Hashemi
  - Takashi Ando
  - et al.
- 2016
- VLSI Technology 2016
Demonstration of record SiGe transconductance and short-channel current drive in High-Ge-Content SiGe PMOS FinFETs with improved junction and scaled EOT
- - Pouya Hashemi
  - Kam-Leung Lee
  - et al.
- 2016
- VLSI Technology 2016
Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C₄F₈ and Ar/CHF₃ plasma
- - Dominik Metzler
  - Chen Li
  - et al.
- 2016
- Journal of Chemical Physics
Toward High-Yield 3D Self-Alignment of Flip-Chip Assemblies via Solder Surface Tension
- - Yves Martin
  - Jae Woong Nah
  - et al.
- 2016
- ECTC 2016
Sub-Micron Bondline-Shape Control in Automated Assembly of Photonic Devices
- - Nicolas Boyer
  - Alexander Janta-Polczynski
  - et al.
- 2016
- ECTC 2016