Etching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
- Juliano Borges
- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
Publications
26347 results for Science
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- Benjamin D. Rafael-Naab
- Jong Keun Park
- et al.
- 2024
- SPIE Advanced Lithography 2024
Disruptive non-fluorinated photoacid generators using computational chemistry and library design
- P. Labeaume
- K. Hernandez
- et al.
- 2024
- SPIE Advanced Lithography 2024
Efficient Syndrome Decoder for Heavy Hexagonal QECC via Machine Learning
- Debasmita Bhoumik
- Ritajit Majumdar
- et al.
- 2024
- ACM TQC
A Unifying Framework for Incompleteness, Inconsistency, and Uncertainty in Databases
- Benny Kimelfeld
- Phokion G. Kolaitis
- 2024
- Communications of the ACM
Chemical Space Analysis and Property Prediction for Carbon Capture Amine molecules
- James Mcdonagh
- Stamatia Zavitsanou
- et al.
- 2024
- Digital Discovery
Quantum Complexity of the Kronecker Coefficients
- Sergey Bravyi
- Anirban Chowdhury
- et al.
- 2024
- PRX Quantum
Complex Chemical Reaction Networks for Future Information Processing
- 2024
- Frontiers in Neuroscience
Chemical space analysis and property prediction for carbon capture solvent molecules
- James L. McDonagh
- Stamatia Zavitsanou
- et al.
- 2024
- Digital Discovery
Shrinking VOD traffic via rényi-entropic optimal transport
- Chi-Jen Roger Lo
- Mahesh K. Marina
- et al.
- 2024
- Proceedings of the ACM on Measurement and Analysis of Computing Systems