Publications

14329 results for Physical Sciences

One-Micron Polycide (WSI₂ on Poly-Si) MOSFET Technology
- - M.Y. Tsai
  - H.H. Chao
  - et al.
- 2019
- JES
Developer Temperature Effects on E-Beam and Optically Exposed Positive Photoresist
- - J.M. Shaw
  - M. Hatzakis
- 2019
- JES
Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
- - E.A. Irene
- 2019
- JES
RIE Contamination of Etched Silicon Surfaces
- - L.M. Ephrath
  - R.S. Bennett
- 2019
- JES
Al Coverage of Surface Steps at SiO2 Insulated Polycrystalline Si Boundaries: Al Evaporation in Vacuum and Low Pressure Ar
- - V.J. Silvestri
  - V.L. Rideout
  - et al.
- 2019
- JES
The Dissolution Kinetics of GaAs in Undersaturated Isothermal Solutions in the Ga-Al-As System
- - M.B. Small
  - R. Ghez
  - et al.
- 2019
- JES
The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
A Viscous Flow Model to Explain the Appearance of High Density Thermal Si02 at Low Oxidation Temperatures
- - E. Tierney
  - J. Angilello
- 2019
- JES
Properties of AI2O3 Films Deposited from the AICI3, CO2, and H2 System
- - V.J. Silvestri
  - C.M. Osburn
  - et al.
- 2019
- JES
Ellipsometry Measurements of Polycrystalline Silicon Films
- - E.A. Irene
  - D.W. Dong
- 2019
- JES