Effects of reactive ion etching on chemical vapor deposition
- C.Y. Wong
- P.E. Batson
- 1987
- Applied Physics Letters
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2347 results at Applied Physics Letters
Nonequilibrium boron doping effects in low-temperature epitaxial silicon films
- B.S. Meyerson
- F. Legoues
- et al.
- 1987
- Applied Physics Letters
Effect of heat treatments on the electrical resistivity of polycrystalline silicon films implanted with antimony
- Y. Komem
- H.B. Harrison
- 1987
- Applied Physics Letters
Scanning tunneling microscopy and potentiometry on a semiconductor heterojunction
- P. Muralt
- H.P. Meier
- et al.
- 1987
- Applied Physics Letters
Picosecond photoelectron scanning electron microscope for noncontact testing of integrated circuits
- P.G. May
- J.-M. Halbout
- et al.
- 1987
- Applied Physics Letters
Effects of radiation damage in ion-implanted thin films of metal-oxide superconductors
- G.J. Clark
- A.D. Marwick
- et al.
- 1987
- Applied Physics Letters
GaAs-GaAlAs graded-index separate confinement heterostructure laser diodes selectively grown by molecular beam epitaxy on SiO2-masked substrates
- J.M. Hong
- M.C. Wu
- et al.
- 1987
- Applied Physics Letters
Long-range order in InxGa1-xAs
- T.S. Kuan
- W.I. Wang
- et al.
- 1987
- Applied Physics Letters
X-ray characterization of surface and bulk structures of sputtered iron oxide thin film
- T.C. Huang
- B.R. York
- 1987
- Applied Physics Letters
Highly activated shallow Ga profiles in silicon obtained by implantation and rapid thermal annealing
- H.B. Harrison
- Subramanian S. Iyer
- et al.
- 1987
- Applied Physics Letters