Formation and stability of NiSi in the presence of Co and Fe alloying elements
- D. Deduytsche
- C. Detavernier
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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194 results for Christian Lavoie
Nucleation and diffusion during growth of ternary Co1-x Nix Si2 thin films studied by complementary techniques in real time
- D. Smeets
- J. Demeulemeester
- et al.
- 2008
- Journal of Applied Physics
Effect of Pt addition on growth stress and thermal stress of NiSi films
- C. Van Bockstael
- K. De Keyser
- et al.
- 2008
- Journal of Applied Physics
Epitaxial formation of a metastable hexagonal nickel-silicide
- K. De Keyser
- C. Van Bockstael
- et al.
- 2008
- Electrochemical and Solid-State Letters
Texture of NiSi films on Si(001), (111), and (110) substrates
- C. Detavernier
- J.L. Jordan-Sweet
- et al.
- 2008
- Journal of Applied Physics
In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon
- W. Knaepen
- C. Detavernier
- et al.
- 2008
- Thin Solid Films
The role of lattice mismatch and kinetics in texture development: Co 1-xNixSi2 thin films on Si(100)
- D. Smeets
- A. Vantomme
- et al.
- 2008
- Journal of Applied Physics
Kinetics of Ni3Si2 formation in the Ni 2Si-NiSi thin film reaction from in situ measurements
- J.A. Kittl
- M.A. Pawlak
- et al.
- 2007
- Applied Physics Letters
Stress evolution during Ni-Si compound formation for fully silicided (FUSI) gates
- C. Torregiani
- C. Van Bockstael
- et al.
- 2007
- Microelectronic Engineering
Ni-Pt silicide formation through Ti mediating layers
- Paul Besser
- Christian Lavoie
- et al.
- 2007
- Microelectronic Engineering