Texture of suicide films on Si(001) : The occurrence of axiotaxy in cubic CoSi ₂, tetragonal α-FeSi ₂ and orthorhombic NiSi

Abstract

It was found that cubic CoSi 2, tetragonal α-FeSi 2 and orthorhombic NiSi films formed by the solid state reaction of metal films and single crystal Si(100) substrates are textured. The polycrystalline films consist of grains in which certain crystallographic planes align preferentially with (110)-type planes of Si, leading to an off-normal fiber-like texture. © 2004 IEEE.