Next Generation Infrared (IR) Laser Debonding / Silicon Handle Technology for Precision Chiplet Technology Applications
- Qianwen Chen
- Michael Belyansky
- et al.
- 2023
- ECTC 2023
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11 results for Yasir Sulehria
Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
- Takeshi Nogami
- Oleg Gluschenkov
- et al.
- 2022
- VLSI Technology and Circuits 2022
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
- Oleg Gluschenkov
- Heng Wu
- et al.
- 2018
- IEDM 2018
Improving FinFET Junctions and Contacts via Laser Annealing
- Oleg Gluschenkov
- Yasir Sulehria
- et al.
- 2023
- IWJT 2023
Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around Nanosheet P-type Devices
- Huimei Zhou
- Miaomiao Wang
- et al.
- 2023
- IRPS 2023
Impact of Nanosecond Laser Anneal on PVD Ru Films
- D. Sil
- Yasir Sulehria
- et al.
- 2021
- IITC 2021
Energy density and temperature calibration for feol nanosecond laser annealing
- Yasir Sulehria
- Oleg Gluschenkov
- et al.
- 2020
- ASMC 2020
Effect of chamber surface coat on TiN film growth
- Shanti Pancharatnam
- J. Wynne
- et al.
- 2019
- ASMC 2019
Development of TiO2 containing hardmasks through PEALD deposition
- Anuja De Silva
- Indira Seshadri
- et al.
- 2017
- SPIE Advanced Lithography 2017
Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams
- Akira Uedono
- Takeshi Nogami
- et al.
- 2023
- Journal of Applied Physics