Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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11 results for Yasir Sulehria

Next Generation Infrared (IR) Laser Debonding / Silicon Handle Technology for Precision Chiplet Technology Applications
- - Qianwen Chen
  - Michael Belyansky
  - et al.
- 2023
- ECTC 2023
Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
- - Takeshi Nogami
  - Oleg Gluschenkov
  - et al.
- 2022
- VLSI Technology and Circuits 2022
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
- - Oleg Gluschenkov
  - Heng Wu
  - et al.
- 2018
- IEDM 2018
Improving FinFET Junctions and Contacts via Laser Annealing
- - Oleg Gluschenkov
  - Yasir Sulehria
  - et al.
- 2023
- IWJT 2023
Impact of Gate Stack Thermal Budget on NBTI Reliability in Gate-All-Around Nanosheet P-type Devices
- - Huimei Zhou
  - Miaomiao Wang
  - et al.
- 2023
- IRPS 2023
Impact of Nanosecond Laser Anneal on PVD Ru Films
- - D. Sil
  - Yasir Sulehria
  - et al.
- 2021
- IITC 2021
Energy density and temperature calibration for feol nanosecond laser annealing
- - Yasir Sulehria
  - Oleg Gluschenkov
  - et al.
- 2020
- ASMC 2020
Effect of chamber surface coat on TiN film growth
- - Shanti Pancharatnam
  - J. Wynne
  - et al.
- 2019
- ASMC 2019
Development of TiO₂ containing hardmasks through PEALD deposition
- - Anuja De Silva
  - Indira Seshadri
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Impact of nanosecond laser annealing on vacancies in electroplated Cu films studied by monoenergetic positron beams
- - Akira Uedono
  - Takeshi Nogami
  - et al.
- 2023
- Journal of Applied Physics