IITC 2018
Conference paper

Impact of Liner Metals on Copper Resistivity at beyond 7nm Dimensions

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The impacts of ruthenium and cobalt liners on copper resistivity have been investigated at beyond 7nm dimensions. Liner metal conduction was carefully evaluated in a Cu resistivity derivation using the temperature coefficient of resistivity (TCR) approach. Cu resistivity with Ru liner is higher than with a Co liner by 10-15%, which is verified by RC plot. The resistivity difference is attributed to interface scattering and possibly grain boundary scattering. Interface ab initio calculations show 3-7% increase of Cu resistivity from Co liner to Ru liner.