Publications
- Mukta Farooq
- Arvind Kumar
- et al.
- 2022
- ECTC 2022
- Hiroyuki Mori
- Sayuri Kohara
- 2021
- ECTC 2021
- 2021
- IEEE Transactions on CPMT
- Elizabeth A. Duch
- Minhua Lu
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
- Nick Polomoff
- Jennifer Fullam
- et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025