Selectively enhanced silicide formation by a gold interlayer: Probing the dominant diffusing species and reaction mechanisms during thin-film reactions
- Chin-An Chang
- Jerng-Sik Song
- 1987
- Applied Physics Letters
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2347 results at Applied Physics Letters
Stable photoinduced paramagnetic defects in hydrogenated amorphous silicon nitride
- David T. Krick
- P. Lenahan
- et al.
- 1987
- Applied Physics Letters
Characterization of reactively sputtered ruthenium dioxide for very large scale integrated metallization
- L. Krusin-Elbaum
- M. Wittmer
- et al.
- 1987
- Applied Physics Letters
Formation of submicron epitaxial islands of Pd2Si on silicon
- C.B. Boothroyd
- W.M. Stobbs
- et al.
- 1987
- Applied Physics Letters
Cr- and Cu-polyimide interface: Chemistry and structure
- R.C. White
- R. Haight
- et al.
- 1987
- Applied Physics Letters
Laser photoablation processes in organosilane thin films
- E.E. Marinero
- R.D. Miller
- 1987
- Applied Physics Letters
Spatial variation of the observed energy gap in granular superconducting NbN films
- J.R. Kirtley
- S.I. Raider
- et al.
- 1987
- Applied Physics Letters
Tunneling and transverse wave vector conservation in GaAs/AlGaAs heterostructures
- John A. Lebens
- Robert H. Silsbee
- et al.
- 1987
- Applied Physics Letters
Field-assisted bonding below 200°C using metal and glass thin-film interlayers
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Applied Physics Letters
On the relative importance of physical and chemical sputtering during ion-enhanced etching of silicon by XeF2
- F.A. Houle
- 1987
- Applied Physics Letters