Publication
Applied Physics Letters
Paper

Laser writing of copper lines from metalorganic films

View publication

Abstract

Direct writing of high-purity copper lines has been achieved by photothermal decomposition of copper formate films under ambient conditions using a focused argon ion laser (514 nm) beam on a scanning quartz or silicon substrate. The fast decomposition kinetics of the precursor allows use of writing speeds as high as 1 cm/s for deposition of micron-thick copper films. There is negligible oxidation of the copper after decomposition in the presence of air due to the rapid heating and cooling of the deposit during laser writing.

Date

01 Dec 1987

Publication

Applied Physics Letters

Authors

Share