Quantification of local strain distributions in nanoscale strained SiGe FinFET structures
- S. Mochizuki
- Conal E. Murray
- et al.
- 2017
- Journal of Applied Physics
Publications
This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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23 results for S. Mochizuki
High-precision deformation mapping in finFET transistors with two nanometre spatial resolution by precession electron diffraction
- David Cooper
- N. Bernier
- et al.
- 2017
- Applied Physics Letters
Study of phosphorus doped Si:C films formed by in situ doped Si epitaxy and implantation process for n-type metal-oxide-semiconductor devices
- S. Mochizuki
- Rainer Loesing
- et al.
- 2017
- JVSTB