Jim Adkisson, Marwan H. Khater, et al.
ECS Meeting 2012
We achieved mid-10-10 Ω-cm2 n-type S/D contact resistivity (npc) and 1.9×10-9 Ω-cm2 p-type S/D contact resistivity (ppc) by employing laser-induced liquid or solid phase epitaxy (LPE/SPE) of Si
Jim Adkisson, Marwan H. Khater, et al.
ECS Meeting 2012
Barry P. Linder, A. Dasgupta, et al.
IRPS 2016
Sadanand V. Deshpande, Ahmet Ozcan, et al.
IWJT 2010
F. Menges, Fabian Motzfeld, et al.
IEDM 2016