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Allen Gabor- 2017
- SPIE Advanced Lithography 2017
- 2017
- SPIE Advanced Lithography 2017
- Timothy Wiltshire
- Christopher Ausschnitt
- et al.
- 2011
- ASMC 2011
- 2011
- SPIE Advanced Lithography 2011
- 2010
- SPIE Advanced Lithography 2010
- 2008
- SPIE Advanced Lithography 2008
- 2007
- SPIE Advanced Lithography 2007
- Haoren Zhuang
- Helen Wang
- et al.
- 2007
- ISTC 2007
- Scan Bums
- Dirk Pfeiffer
- et al.
- 2006
- SPIE Advanced Lithography 2006