Publications

25 results for Allen Gabor

Overlay statistics for multiple exposure patterning
- - Allen H. Gabor
  - Nelson M. Felix
- 2017
- SPIE Advanced Lithography 2017
Mix-and-match considerations for EUV insertion in N7 HVM
- - Xuemei Chen
  - Allen Gabor
  - et al.
- 2017
- SPIE Advanced Lithography 2017
High performance 14nm SOI FinFET CMOS technology with 0.0174μm² embedded DRAM and 15 levels of Cu metallization
- - C.-H.C-H. Lin
  - Brian Greene
  - et al.
- 2014
- IEDM 2014
Advanced overlay control in volume manufacturing
- - Timothy Wiltshire
  - Christopher Ausschnitt
  - et al.
- 2011
- ASMC 2011
Overlay improvement roadmap: Strategies for scanner control and product disposition for 5-nm overlay
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2011
- SPIE Advanced Lithography 2011
Smaller, smarter, faster, and more accurate: The new overlay metrology
- - Nelson M. Felix
  - Allen H. Gabor
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Measuring layer-specific depth-of-focus requirements
- - Bernhard Liegl
  - Allen Gabor
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Improving the power-performance of multicore processors through optimization of lithography and thermal processing
- - A. Gabor
  - T.A. Brunner
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Patterning strategies for gate level tip-tip distance reduction in SRAM cell for 45nm and beyond
- - Haoren Zhuang
  - Helen Wang
  - et al.
- 2007
- ISTC 2007
High performance 45-nm SOI technology with enhanced strain, porous low-k BEOL, and immersion lithography
- - S. Narasimha
  - K. Onishi
  - et al.
- 2006
- IEDM 2006