Publications

77 results for Sidney Tsai

High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2016
- SPIE Advanced Lithography 2016
DSA patterning options for FinFET formation at 7nm node
- - Chi Chun Liu
  - Elliott Franke
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Resistivity of copper interconnects beyond the 7 nm node
- - Adam Pyzyna
  - Robert L. Bruce
  - et al.
- 2015
- VLSI Technology 2015
Fin formation using graphoepitaxy DSA for FinFET device fabrication
- - Chi Chun Liu
  - Fee Li Lie
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Customization and design of directed self-assembly using hybrid prepatterns
- - Joy Y. Cheng
  - Gregory S. Doerk
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Self-aligned line-space pattern customization with directed self-assembly graphoepitaxy at 24nm pitch
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Directed self-assembly of topcoat-free, integration-friendly high-χ block copolymers
- - Eri Hirahara
  - Margareta Paunescu
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Electrical characterization of FinFETs with fins formed by directed self assembly at 29 nm fin pitch using a self-aligned fin customization scheme
- - Hsinyu Tsai
  - Hiroyuki Miyazoe
  - et al.
- 2014
- IEDM 2014
Two-dimensional pattern formation using graphoepitaxy of PS-b-PMMA block copolymers for advanced FinFET device and circuit fabrication
- - Hsinyu Tsai
  - Jed W. Pitera
  - et al.
- 2014
- ACS Nano
Computational lithography platform for 193i-guided directed self-assembly
- - Kafai Lai
  - Melih Ozlem
  - et al.
- 2014
- SPIE Advanced Lithography 2014