86 results for
Nelson Felix- Shay Reboh
- Chen Zhang
- et al.
- 2025
- VLSI Technology and Circuits 2025
- Gopal Kenath
- Martin Burkhardt
- et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
- I. Seshadri
- E. Miller
- et al.
- 2023
- IEDM 2023
- Indira Seshadri
- Eric Miller
- et al.
- 2023
- IEDM 2023
- Curtis Durfee
- Ivo Otto
- et al.
- 2023
- ECS Meeting 2023
- Curtis Durfee
- Ivo Otto
- et al.
- 2023
- SSDM 2023
- Takeshi Nogami
- Oleg Gluschenkov
- et al.
- 2022
- VLSI Technology and Circuits 2022
- Eric Miller
- Indira Seshadri
- et al.
- 2022
- SPIE Advanced Lithography 2022