Conference paper
The future of SOI transistor technology
Bruce Doris, Ali Khakifirooz, et al.
IEEE International SOI Conference 2011
We detail the use of ring oscillators (ROs) for yield learning during the research phase of a CMOS technology generation. Failing circuits are located and classified based on electrical analysis of ROs and FETs (Field Effect Transistor) wired out from RO environments. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.
Bruce Doris, Ali Khakifirooz, et al.
IEEE International SOI Conference 2011
Pritish Narayanan, Stefano Ambrogio, et al.
IEEE T-ED
F. Allibert, Kangguo Cheng, et al.
S3S 2012
G. Tsutsui, Huimei Zhou, et al.
VLSI Technology 2017