IEEE Trans Semicond Manuf

Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing

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We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.