Measuring Contact Hole Distributions for Use in Predicting Missing Contact Hole Rates
- Elisa Novelli
- Chris A. Mack
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paper
Publications
934 results for Semiconductors
Scaling Single Expose EUV Gate LER Through Source-Resist-Mask Co-optimization
- Gopal Kenath
- Martin Burkhardt
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
Conference paperExploring the Limits of Contact Hole Patterning with High NA EUV Lithography
- Dario Goldfarb
- Zheng Chen
- et al.
- 2026
- SPIE Advanced Lithography + Patterning 2026
TalkPiggybacked SC-on-CSCR: A Modular On-Chip Switched-Capacitor Converter for 12-to-60V Input 1.8-to-5V Output Achieving 5.67mW/mm2 Power Density and 71.5% Peak Efficiency
- Y. Yang
- Xin Zhang
- et al.
- 2026
- ISSCC 2026
Conference paperProactive Power Management-Based Supply Regulation with Online Learning for Variation-Tolerant Workload-Aware Droop Mitigation in 28nm CMOS
- X. Chen
- A. Liss
- et al.
- 2026
- ISSCC 2026
Conference paperSpyre: An inference-optimized scalable AI accelerator for enterprise workloads
- Matt Cohen
- Monodeep Kar
- et al.
- 2026
- ISSCC 2026
Conference paperA Single-Chip Laser Diode Driver with Built-In Frequency-Sweep Linearization for FMCW LiDAR
- W. Zhu
- J. Jiang
- et al.
- 2026
- ISSCC 2026
Conference paperAlgorithm Architecture Co-Design for Analog In-Memory Computing
- 2026
- ISSCC 2026
Workshop paperEnabling Spill-Free Compilation via Affine-Based Live Range Reduction Optimization
- Prasanth Chatarasi
- Alex Gatea
- et al.
- 2026
- CGO 2026
Conference paperEnterprise Class On-Chip Accelerator Integration
- Deanna Berger
- Alper Buyuktosunoglu
- et al.
- 2026
- HPCA 2026
Conference paper