Reactive Ion Etching of PECVD Amorphous Silicon and Silicon Nitride Thin Films with Fluorocarbon Gases
- Yue Kuo
- 2019
- JES
Publications
14330 results for Physical Sciences
X-Ray Absorption Study of Electrochemically Grown Oxide Films on Al-Cr Sputtered Alloys: I. Ex situ Studies
- A.J. Davenport
- H.S. Isaacs
- et al.
- 2019
- JES
Optimization of Electrodeposit Uniformity by the Use of Auxiliary Electrodes
- S. Mehdizadeh
- J. Dukovic
- et al.
- 2019
- JES
Dopant Diffusion in Self-Aligned Silicide/Silicon Structures
- Marc Wittmer
- 2019
- JES
Temperature and Bias Effects on the Physical and Tribological Properties of Diamond-Like Carbon
- A. Grill
- V.V. Patel
- et al.
- 2019
- JES
Effects of oxygen on the rie characteristics of aluminum films
- S.P. Holland
- Graham Olive
- et al.
- 2019
- JES
Correlation between environmental and electrochemical corrosion of thin film magnetic recording media
- V. Novotny
- N. Staud
- 2019
- JES
The Effects of Pressure, Temperature, and Time on the Annealing of lonizing Radiation Induced Insulator Damage in N-channel IGFET's
- A. Reisman
- C.J. Merz
- 2019
- JES
Photochemically Generated Gold Catalyst for Selective Electroless Plating of Copper
- Thomas H. Baum
- 2019
- JES
The Use of Gas Monitors to Characterize a Low-Temperature Atmospheric-Pressure Epitaxial System
- Paul D. Agnello
- Thomas O. Sedgwick
- 2019
- JES