Reactive Ion Etching of PECVD Amorphous Silicon and Silicon Nitride Thin Films with Fluorocarbon Gases
- Yue Kuo
- 2019
- JES
Publications
14330 results for Physical Sciences
Electrical Properties of Chemical-Mechanical Polished Tetraethyl Orthosilicate Films with and Without Capping Layers
- S. Cohen
- M.A. Jaso
- et al.
- 2019
- JES
Repassivation transients measured with thin film breaking electrodes
- G.S. Frankel
- B. Rush
- et al.
- 2019
- JES
The electrochemical oxidation and polymerization of polycyclic hydrocarbons
- Joachim Bargon
- A. Diaz
- 2019
- JES
Surface Physics in Silicon Molecular Beam Epitaxy
- F.J. Himpsel
- J.F. Morar
- et al.
- 2019
- JES
Initiation of electroless copper plating using Pd+2/poly(acrylic acid) films
- Robert L. Jackson
- 2019
- JES
Energy Considerations in the Deposition of High-Quality Plasma-Enhanced CVD Silicon Dioxide
- E. Tierney
- J. Batey
- et al.
- 2019
- JES
PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
Composition Determination of Electrodeposited NiSn and PbSn Alloys Using Stripping Voltammetry at a Rotating Ring-Disk Electrode
- K.H. Wong
- P.C. Andricacos
- 2019
- JES
The Polycrystalline-Si Contact to GaAs
- P.D. Kirchner
- J.M. Woodall
- et al.
- 2019
- JES