Publications

2357 results at Journal of Applied Physics

Shallow junctions by high-dose As implants in Si: Experiments and modeling
- - M.Y. Tsai
  - F.F. Morehead
  - et al.
- 2008
- Journal of Applied Physics
The thin-film formation of rhodium silicides
- - S. Petersson
  - R.L. Anderson
  - et al.
- 2008
- Journal of Applied Physics
A method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processes
- - U. Gerlach-Meyer
  - J.W. Coburn
  - et al.
- 2008
- Journal of Applied Physics
Calculation of changes in pattern dimensions to compensate for proximity effects in electron lithography
- - Mihir Parikh
- 2008
- Journal of Applied Physics
The application of elastobirefringence to the study of strain fields and dislocations in III-V compounds
- - H. Booyens
  - J.H. Basson
- 2008
- Journal of Applied Physics
Dipole layers at the metal-SiO₂ interface
- - T.W. Hickmott
- 2008
- Journal of Applied Physics
Hole trapping in the bulk of SiO₂ layers at room temperature
- - R.F. DeKeersmaecker
  - D.J. Dimaria
- 2008
- Journal of Applied Physics
Parallel silicide contacts
- - I. Ohdomari
  - K.N. Tu
- 2008
- Journal of Applied Physics
X-ray photoelectron spectroscopy and Auger electron spectroscopy studies of glow discharge Si_1-xC_x:H films
- - Wen-Yaung Lee
- 2008
- Journal of Applied Physics
Domain electroluminescence in ac thin-film devices
- - H. Rüfer
  - V. Marrello
  - et al.
- 2008
- Journal of Applied Physics