Learning from native defects on EUV mask blanks
- Emily Gallagher
- Alfred Wagner
- et al.
- 2014
- SPIE Optics + Photonics 2014
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3520 results for Mathematical Sciences
GlyphSea: Visualizing vector fields
- Emmett McQuinn
- Amit Chourasia
- et al.
- 2014
- VDA 2014
A Riesz energy based approach to generating dispersed dot patterns for halftoning applications
- Chai Wah Wu
- Barry Trager
- et al.
- 2014
- CI-DPHA 2014
Hybrid halftoning using direct multi-bit search (DMS) screen algorithm
- Kartheek Chandu
- Mikel Stanich
- et al.
- 2014
- CI-DPHA 2014
A reference web architecture and patterns for real-time visual analytics on large streaming data
- Eser Kandogan
- Danny Soroker
- et al.
- 2014
- VDA 2014
Computational lithography platform for 193i-guided directed self-assembly
- Kafai Lai
- Melih Ozlem
- et al.
- 2014
- SPIE Advanced Lithography 2014
Automated sample plan selection for OPC modeling
- Nathalie Casati
- Maria Gabrani
- et al.
- 2014
- SPIE Advanced Lithography 2014
Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk
- David Fryer
- Michael Lam
- et al.
- 2014
- SPIE Advanced Lithography 2014
Fast detection of novel problematic patterns based on dictionary learning and prediction of their lithographic difficulty
- F. De Morsier
- David Demaris
- et al.
- 2014
- SPIE Advanced Lithography 2014
Characterization and mitigation of overlay error on silicon wafers with nonuniform stress
- T.A. Brunner
- V. Menon
- et al.
- 2014
- SPIE Advanced Lithography 2014