Publications

509 results at JES

Phosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- - B.S. Meyerson
  - W.L. Olbricht
- 2019
- JES
A Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- - E. Bassous
  - G. Pepper
  - et al.
- 2019
- JES
Combined Experimental and Modeling Study of Spatial Effects in Plasma Etching: CF₄/O₂ Etching of Silicon
- - M. Dalvie
  - K.F. Jensen
- 2019
- JES
In Situ Scanning Tunneling Microscopy of Copper Deposition with Benzotriazole
- - Rolf H. Muller
- 2019
- JES
Comparative Study of Phosphorescence and Photostimulated Luminescence in Zinc Silicate Phosphors and Their Description by a Tunneling Model
- - P. Thioulouse
  - I.F. Chang
  - et al.
- 2019
- JES
In Situ X-Ray Absorption Study of Chromium Valency Changes in Passive Oxides on Sputtered ALC_r Thin Films Under Electrochemical Control
- - A.J. Davenport
  - H.S. Isaacs
  - et al.
- 2019
- JES
Maskless Laser Patterning for Gold Plating of Microelectronic Materials
- - R.J. von Gutfeld
  - M.H. Gelchinski
  - et al.
- 2019
- JES
Simulation of Leveling in Electrodeposition
- - John O. Dukovic
  - Charles W. Tobias
- 2019
- JES
A Mathematical Model for Silicide Oxidation
- - S.-L. Zhang
  - R. Ghez
  - et al.
- 2019
- JES
Determination of partial currents for cuni and cuco electrodeposition using rotating ring-disk electrodes
- - Jean Horkans
  - I-Chia Hsu Chang
  - et al.
- 2019
- JES