A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
No abstract available.
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008