Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

X-ray reflectivity study of Si0₂on Si
- - A.A. Bright
  - G.W. Rubioff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Si₂Cl₆and Si₂H₆adsorption on CaF₂/Si(111)
- - L.J. Terminello
  - F.J. Himpsel
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ion energy measurements at the surface of an ion cyclotron range of frequencies antenna faraday shield
- - D.J. Hoffman
  - R.A. Langley
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
An aerosol model of particle generation during pressure reduction
- - J.J. Wu
  - Douglas W. Cooper
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Slope control of molybdenum lines etched with reactive ion etching
- - Yue Kuo
  - J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
integrated thermal chemical vapor deposition processing for Si technology
- - M. Liehr
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Growth of CoSi₂on Si(001): Structure, defects, and resistivity
- - R.D. Thompson
  - S.S. Iyer
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Density dependence of the electrochemical characteristics of carbon overcoated thin film media
- - Grace L. Gorman
  - John Duran
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Defect microchemistry in Si0₂/Si structures
- - G.W. Rubloff
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
In situ plasma contamination measurements by HeNe laser light scattering: A case study
- - J.S. Mckillop
  - Kurt L. Haller
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films