Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

X-ray photoelectron spectroscopy and ellipsometry studies of the electrochemically controlled adsorption of benzotriazole on copper surfaces
- - S.L. Cohen
  - V. Brusic
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Microstructure of yttria-stabilized zirconia overcoats for thin film recording media
- - C. Hwang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
High rate radio frequency sputtering using in-phase plasma confinement
- - James E. Lucy
  - John Costable
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Molecular-beam study of gas-surface chemistry in the ion assisted etching of silicon with atomic and molecular hydrogen and chlorine
- - J.W. Coburn
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Localized charge force microscopy
- - B.D. Terris
  - J.E. Stern
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion studies of metals on fluorocarbon polymer films
- - Chin-An Chang
  - Yong-Kil Kim
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dry etching of TiN/Al(Cu)/Si for very large scale integrated local interconnections
- - K.W. Choi
  - N.J. Mazzeo
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Initial stage deposition of Ag on the Si (100)2x1 surface studied by scanning tunneling microscopy
- - T. Hashizume
  - R.J. Hamers
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Scanning probe microscopy: Current status and future trends
- - H. Kumar Wickramasinghe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Nucleation controlled phase selection in vanadium/amorphous silicon multilayer thin films
- - R.R. de Avillez
  - E. Ma
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films