Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Localized charge force microscopy

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A force microscope has been used to deposit and image localized charge on insulating surfaces. The charge is deposited either by applying a voltage pulse to the microscope tip or by contact charging the insulator surface with the tip. An improved mode of charge imaging is presented, which distinguishes between charge and topography and allows the sign of the charge to be determined in a single scan. © 1990, American Vacuum Society. All rights reserved.