Picosecond photoemission sampling for contactless high speed integrated circuit diagnostics
- A. Blacha
- R. Clauberg
- et al.
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
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3523 results for Mathematical Sciences
Photoelectron scanning electron microscope (PSEM) for high speed noncontact testing
- P.G. May
- J.-M. Halbout
- et al.
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
High performance silicon bipolar technology
- G.-P. Li
- M.B. Ketchen
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
Characterization of logic devices with photoconductively generated picosecond pulses
- J.-M. Halbout
- P.G. May
- et al.
- 1987
- Advances in Semiconductors and Semiconductor Structures 1987
Review of e-beam electrical test techniques
- Fritz J. Hohn
- 1989
- Proceedings of SPIE 1989
Review of Contamination Detection on Patterned Surfaces
- J. Samuel Batchelder
- 1989
- Proceedings of SPIE 1989
Spatially Resolved Non-Contact Surface Photovoltage In Semiconductors
- Daniel Guidotti
- 1989
- Proceedings of SPIE 1989
High speed device testing and internal node diagnostics
- George Chiu
- Jean-Marc Halbout
- et al.
- 1987
- Microlithography 1987
Sub-halfmicron negative resist systems by image reversal
- K. Chiong
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Enhancement of RIE resistance of conventional resist materials
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989