Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Two very basic transformations in multivariate statistics are those of a p×q matrix X to a p×q matrix Y defined by Y=AXB (where A and B are matrices of constants) and of a p×p nonsingular matrix X to a p×p matrix W defined by W=X-1. The Jacobians of these transformations are known to be |A|q|B|p and (-1)p|X|-2p, respectively, or |A|p+1 and (-1)p(p+1)/2|X|-(p+1), respectively, depending on whether X is unrestricted or X is symmetric and B=A′. The derivation of these formulas is greatly facilitated by the introduction of the vec and vech operators [H. Neudecker, J. Amer. Statist. Assoc. 64 (1969) 953-963; H.V. Henderson, S.R. Searle, Canad. J. Statist. 7 (1979) 65-81; J.R. Magnus, H. Neudecker, SIAM J. Algebraic Discrete Methods 1 (1980) 422-449; J.R. Magnus, H. Neudecker, Econometric Theory 2 (1986) 157-190]. Only relatively basic properties of these operators are needed. Arguments that appeal to the existence of the singular value decomposition or to related decompositions are not needed; nor is it necessary to introduce matrix differentials. © 2000 Elsevier Science Inc.
J. LaRue, C. Ting
Proceedings of SPIE 1989
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Andrew Skumanich
SPIE Optics Quebec 1993
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989