Invited: The potential of Electron Beam Technology for Microfabrication
- T.H.P. Chang
- 2014
- Japanese Journal of Applied Physics
Publications
14 results for T.H.P. Chang
Arrayed lithography using STM-based microcolumns
- T. H. Philip Chang
- Lawrence P. Muray
- et al.
- 1993
- SPIE Advanced Optical Technologies 1993
Arrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
The interior of a whole and unmodified biological object - the zymogen granule - viewed with a high-resolution X-ray microscope
- S. Rothman
- N. Iskander
- et al.
- 1989
- BBA - General Subjects
Electron beam lithography of sub-0.1μm circuits
- S. Rishton
- D. Kern
- et al.
- 1989
- Microelectronic Engineering
Scanning x-ray microscope with 75-nm resolution
- H. Rarback
- D. Shu
- et al.
- 1988
- Review of Scientific Instruments
Zone plate lenses for X-ray microscopy
- Y. Vladimirsky
- D. Kern
- et al.
- 1988
- Nuclear Inst. and Methods in Physics Research, A
Design and Experimental Technology for 0.1-μm Gate-Length Low-Temperature Operation FET's
- George A. Sai-Halasz
- Matthew R. Wordeman
- et al.
- 1987
- IEEE Electron Device Letters
Electron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopy
- D. Kern
- P. Coane
- et al.
- 1989
- Proceedings of SPIE 1989
Electron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arrays
- F.J. Hohn
- T.H.P. Chang
- et al.
- 1989
- Proceedings of SPIE 1989