Photo-Cross-Linking of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution: Use of Polyfunctional Benzylic Alcohols in the Design of Chemically Amplified Resist Materials with Tunable Sensitivities
- S. Ming Lee
- Jean M. J. Fréchet
- et al.
- 1994
- Macromolecules