Systematic characterization of pseudomorphic (110) intrinsic SiGe epitaxial films for hybrid orientation technology with embedded SiGe source/drain
- Qiqing Ouyang
- Anita Madan
- et al.
- 2006
- MRS Spring Meeting 2006
Publications
116 results for Conal Murray
Effects of BEOL stack on thermal mechanical stress of Cu lines
- Seung-Hyun Rhee
- Conal E. Murray
- et al.
- 2006
- MRS Spring Meeting 2006
Theory for electromigration failure in Cu conductors
- J.R. Lloyd
- C.E. Murray
- et al.
- 2005
- International Workshop on Stress-Induced Phenomena in Metallization 2005
Solution-processed metal chalcogenide films for p-type transistors
- Delia J. Milliron
- David B. Mitzi
- et al.
- 2006
- Chemistry of Materials
Thin-film transistors based on spin-coated chalcogenide semiconductor channels
- David B. Mitzi
- Matthew Copel
- et al.
- 2004
- TFTT 2004
High mobility solution-deposited chalcogenide films for flexible applications
- David B. Mitzi
- Delia J. Milliron
- et al.
- 2005
- VLSI Technology 2005
High-resolution strain mapping in heteroepitaxial thin-film features
- C.E. Murray
- H. Yan
- et al.
- 2005
- Journal of Applied Physics
Spatially transient stress effects in thin films by X-ray diffraction
- C.E. Murray
- C.C. Goldsmith
- et al.
- 2005
- Powder Diffraction
Integration of direct plating of Cu onto a CVD Ru liner
- S. Malhotra
- D. Canaperi
- et al.
- 2004
- AMC 2004
Finite size effects in stress analysis of interconnect structures
- I.C. Noyan
- Conal E. Murray
- et al.
- 2004
- Applied Physics Letters