Publications

109 results for Sebastian Engelmann

Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- - Hiroyuki Miyazoe
  - Sebastian U. Engelmann
  - et al.
- 2017
- JVSTA
Nitride etching with hydrofluorocarbons. I. Selective etching of nitride over silicon and oxide materials by gas discharge optimization and selective deposition of fluorocarbon polymer
- - Sebastian U. Engelmann
  - Robert L. Bruce
  - et al.
- 2017
- JVSTB
Cyclic Cl₂/H₂ quasi-atomic layer etching approach for TiN and TaN patterning using organic masks
- - Nathan Marchack
  - J. M. Papalia
  - et al.
- 2017
- JVSTA
Novel, High-Throughput, Fiber-to-Chip Assembly Employing only Off-the-Shelf Components
- - Nicolas Boyer
  - Alexander Janta-Polczynski
  - et al.
- 2017
- ECTC 2017
High performance and record subthreshold swing demonstration in scaled RMG SiGe FinFETs with high-Ge-content channels formed by 3D condensation and a novel gate stack process
- - Pouya Hashemi
  - Takashi Ando
  - et al.
- 2017
- VLSI Technology 2017
High performance PMOS with strained high-Ge-content SiGe fins for advanced logic applications
- - Pouya Hashemi
  - Takashi Ando
  - et al.
- 2017
- VLSI-TSA 2017
High-throughput photonic packaging
- - Tymon Barwicz
  - Ted W. Lichoulas
  - et al.
- 2017
- OFC 2017
Highly selective dry etching of polystyrene-poly(methyl methacrylate) block copolymer by gas pulsing carbon monoxide-based plasmas
- - Hiroyuki Miyazoe
  - Ashish Jagtiani
  - et al.
- 2017
- Journal of Physics D: Applied Physics
A silicon metamaterial chip-to-chip coupler for photonic flip-chip applications
- - Tymon Barwicz
  - Swetha Kamlapurkar
  - et al.
- 2017
- OFC 2017
Reducing line edge roughness in si and sin through plasma etch chemistry optimization for photonic waveguide applications
- - Nathan Marchack
  - Marwan Khater
  - et al.
- 2017
- SPIE Advanced Lithography 2017