Highly textured (100)-oriented and (111)-oriented, cobalt mono silicide nanoribbons: material growth and device fabrication
- Guy Cohen
- Peter Kerns
- et al.
- 2024
- MRS Spring Meeting 2024
Publications
35 results for Nathan Marchack
Applications of Topological Semimetals for Post-Cu Interconnects
- Ching-Tzu Chen
- Hsin Lin
- et al.
- 2024
- MRS Spring Meeting 2024
Plasma Processing and the Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- 2024
- CMC Conference 2024
Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts
- 2024
- IEEE Trans Semicond Manuf
Exploring Topological Semimetals for Highly Scaled Interconnects Beyond Copper
- Ching-Tzu Chen
- Christian Lavoie
- et al.
- 2023
- MRS Spring Meeting 2023
Exploring Unconventional Resistivity Scaling in Topological Semimetals for Interconnects Beyond Copper
- Ching-Tzu Chen
- Christian Lavoie
- et al.
- 2023
- APS March Meeting 2023
Characterization of TSV etch from a sustainability standpoint
- Osakpolo Isowamwen
- Nathan Marchack
- et al.
- 2023
- SPIE Advanced Lithography 2023
Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
- John M. Papalia
- Devi Koty
- et al.
- 2022
- SPIE Advanced Lithography 2022
Towards Enhanced Sustainability in Future Plasma Processes
- Nathan Marchack
- Hiro Miyazoe
- et al.
- 2022
- MRS Spring Meeting 2022
Ultrahigh-Q on-chip silicon-germanium microresonators
- Ryan Schilling
- Chi Xiong
- et al.
- 2022
- Optica