Publications

37 results for Nathan Marchack

Single-step deep reactive ion etch of silicon for through-via applications with alternative gas mixtures
- - Richa Agrawal
  - Nathan Marchack
  - et al.
- 2025
- Journal of Vacuum Science and Technology A Vacuum Surfaces and Films
The Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- - Eric A. Joseph
  - Nathan Marchack
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Highly textured (100)-oriented and (111)-oriented, cobalt mono silicide nanoribbons: material growth and device fabrication
- - Guy Cohen
  - Peter Kerns
  - et al.
- 2024
- MRS Spring Meeting 2024
Applications of Topological Semimetals for Post-Cu Interconnects
- - Ching-Tzu Chen
  - Hsin Lin
  - et al.
- 2024
- MRS Spring Meeting 2024
Plasma Processing and the Semiconductor Supply Chain in an Era of Low GWP and/or PFAS-Free Gas Chemistries
- - Eric A. Joseph
  - Brooke Tvermoes
  - et al.
- 2024
- CMC Conference 2024
Centering Sustainability in Process Development Through Improved Characterization of HFC-PFC Byproducts
- - Nathan Marchack
  - Eric A. Joseph
- 2024
- IEEE Trans Semicond Manuf
Exploring Topological Semimetals for Highly Scaled Interconnects Beyond Copper
- - Ching-Tzu Chen
  - Christian Lavoie
  - et al.
- 2023
- MRS Spring Meeting 2023
Exploring Unconventional Resistivity Scaling in Topological Semimetals for Interconnects Beyond Copper
- - Ching-Tzu Chen
  - Christian Lavoie
  - et al.
- 2023
- APS March Meeting 2023
Characterization of TSV etch from a sustainability standpoint
- - Osakpolo Isowamwen
  - Nathan Marchack
  - et al.
- 2023
- SPIE Advanced Lithography 2023
Control of sidewall roughness formation in through-silicon via etch at non-cryogenic temperatures
- - John M. Papalia
  - Devi Koty
  - et al.
- 2022
- SPIE Advanced Lithography 2022