Metrology for 2D materials: a perspective review from the international roadmap for devices and systems
- Umberto Celano
- Daniel Schmidt
- et al.
- 2024
- Nanoscale Advances
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15 results for Daniel Schmidt
Review of nanosheet metrology opportunities for technology readiness
- Mary A. Breton
- Daniel Schmidt
- et al.
- 2022
- JM3
In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- Yousra Traouli
- Ufuk Kilic
- et al.
- 2024
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Spectral interferometry for fully integrated device metrology
- Daniel Schmidt
- Manasa Medikonda
- et al.
- 2023
- JM3
In-line Raman spectroscopy for gate-all-around nanosheet device manufacturing
- Daniel Schmidt
- Curtis Durfee
- et al.
- 2022
- JM3