Defects in thermal oxide studied by photoluminescence spectroscopyHiroyuki NishikawaJames H. Stathiset al.1999Applied Physics Letters
Hydrogen electrochemistry and stress-induced leakage current in silicaPeter E. BlöchlJames H. Stathis1999Physical Review Letters
Non-Arrhenius temperature dependence of reliability in ultrathin silicon dioxide filmsD.J. DiMariaJ.H. Stathis1999Applied Physics Letters
Oxide scaling limit for future logic and memory technologyJ.H. StathisD.J. DiMaria1999Microelectronic Engineering
Interface state capture cross section measurements on vacuum annealed and radiation damaged Si:SiO2 surfacesM.J. UrenV. Nayaret al.1998JES
Physical model and results of numerical simulation of the degradation of a Si/SiO2 structure as a result of annealing in vacuumG.V. GadiyakJ.H. Stathis1998Semiconductors
Ultimate limit for defect generation in ultra-thin silicon dioxideD.J. DiMariaJ.H. Stathis1997Applied Physics Letters
Explanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structuresD.J. DiMariaJ.H. Stathis1997Applied Physics Letters