Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
- A.C. Tam
- W. Zapka
- et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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21 results for W. Zapka
Flame diagnostic using optoacoustic laserbeam deflection and frequency modulation spectroscopy
- W. Zapka
- P. Pokrowsky
- et al.
- 1989
- Proceedings of SPIE 1989
Continuous wave (CW) Doppler free two-photon frequency modulated (FM) spectroscopy
- W. Zapka
- M. Levenson
- et al.
- 1982
- Max Born Centenary Conference 1982
Noncontact optoacoustic monitoring: flow measurements and other applications
- A.C. Tam
- W. Zapka
- 1982
- CLEO 1982
Laser cleaning: Laser‐induced removal of particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Advanced Materials for Optics and Electronics
"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
Transmission studies of explosive vaporization of a transparent liquid film on an opaque solid surface induced by excimer-laser-pulsed irradiation
- P.T. Leung
- Nhan Do
- et al.
- 1992
- Journal of Applied Physics
Laser-cleaning techniques for removal of surface particulates
- Andrew C. Tam
- Wing P. Leung
- et al.
- 1992
- Journal of Applied Physics
Liquid film enhanced laser cleaning
- W. Zapka
- A.C. Tam
- et al.
- 1992
- Microelectronic Engineering
Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1991
- Applied Physics Letters