A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Paper
"Laser cleaning" removes particles from surfaces
Abstract
Laser-induced removal of particles from surfaces was demonstrated. Such "laser cleaning" can be performed on the bare contaminated surface or with additional micronthickness liquid film coverage on the surface. With the latter "steam laser cleaning" we achieved removal of epoxy, alumina, silicon, and gold particles of size 0.1 μm to 10 μm from silicon surfaces. The proposed mechanism of particle ejection is described. © 1993.
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