Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper discusses the implementation of the SE’TL language on the CDC 6600 computer. SETL is a very high level language that is currently being developed at New York University. Two important properties of SETL are its lack of data declaration statements and its inclusion of the unordered set as a data type. The following are described: I. An existing preliminary implementation. 2. The LITTLE systems programming language, upon which the next SETL implementation is based. 3. Encoding of data. 4. Minimizing data copying. 5. Run time stack management. © 1974, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Trang H. Tran, Lam Nguyen, et al.
INFORMS 2022
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Shu Tezuka
WSC 1991