Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The renormalization-group description of the anisotropic two-dimensional Ising model has been investigated with the use of Monte Carlo renormalization-group methods. We have been able to demonstrate the existence of a fixed line with universal critical exponents, in contrast to the nonuniversality of the Baxter fixed line. The possibility of a model with any given anisotropy being described by any point on the fixed line is demonstrated by explicit calculations. © 1984 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Zeitschrift fur Kristallographie - New Crystal Structures
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