Molecular-controlled fracture and release of templated nanoporous organosilicate thin films

Abstract

The effects of creating porosity by using templating particles on the delamination and fracture properties of organosilicate films was investigated. Poly(ethylene glycol) surface-decorated polystyrene particles were dissolved in a propylene glycol methyl ether acetate (PGMEA) and xylene mixture at a concentration of 20.3 wt%. The porogen solution was then mixed with the organosilicate solution in the propylene glycol monoethyl ether at an equivalent concentration in the desired ratios on a weight basis. All formulations were filtered through a 0.2 μm Teflon membrane syringe filter directly onto 100 mm Si substrates, and spin-coated at 3000 rpm for 30 seconds. It was observed that the nature of the porogen selected to generate porosity in organosilicate thin films has a tremendous impact on the fracture energy.