Local electrochemical oxidation/reduction: First step towards a new lithography?

Abstract

Using c-axis La2CuO4 thin films, we first demonstrate that the electrochemical oxidation mainly occurs along the c axis. Then we induce oxygen-rich regions electrochemically into an otherwise oxygen-deficient matrix. On a microscopic scale the extra oxygen introduced creates metallic and/or superconducting regions in the insulating matrix. Contrary to other lithographic techniques in which large amounts of material are either removed or deposited, this technique does not induce significant height differences. © 1996 American Institute of Physics.