Conference paper
Impact of thin resist processes on post-etch LER
Arpan P. Mahorowala, Dario L. Goldfarb, et al.
Microlithography 2003
An in situ nuclear magnetic resonance (NMR) monitoring, and the application of mercury method to the copolymerization of maleic anhydride and norbornene derivatives is presented. NMR spectral data were processed for quantitative analysis by integration. Integration of the whole resonance range and the dioxane peak remained constant throughout the kinetics run, confirming the quantitative nature of the measurements.
Arpan P. Mahorowala, Dario L. Goldfarb, et al.
Microlithography 2003
Hiroshi Ito, Scott A. MacDonald, et al.
Macromolecules
Ratnam Sooriyakumaran, Hoa Truong, et al.
J. Photopolym. Sci. Tech.
Hong Xu, Thomas E. Dinan, et al.
ECS Meeting 2000