Conference paper
Hybrid Resist Systems Based on a-Substituted Acrylate Copolymers
Hiroshi Ito, Linda K. Sundberg, et al.
SPIE Advanced Lithography 2009
An in situ nuclear magnetic resonance (NMR) monitoring, and the application of mercury method to the copolymerization of maleic anhydride and norbornene derivatives is presented. NMR spectral data were processed for quantitative analysis by integration. Integration of the whole resonance range and the dioxane peak remained constant throughout the kinetics run, confirming the quantitative nature of the measurements.
Hiroshi Ito, Linda K. Sundberg, et al.
SPIE Advanced Lithography 2009
Hiroshi Ito
SPIE Advanced Lithography 2008
Hiroshi Ito, Debra-Fenzel Alexander, et al.
J. Photopolym. Sci. Tech.
Hiroshi Ito, Tomonari Nakayama, et al.
Chemistry of Materials