IBM Lithography Roadmap and Need for Future Lithography Tools
- Allen Gabor
- Martin Burkhardt
- et al.
- 2025
- EUVL and Source Workshop 2025
Dario Goldfarb
Title
Research Staff Member
Publications
Dry heterometallic resist processing based on thermal sublimation deposition and development
- Dario Goldfarb
- Scott Lewis
- et al.
- 2022
- JM3
Patents
- US
- 10831102
- US
- 10748823
- US
- 10727055
- US
- 10678135
- US
- 10656523
- US
- 10569307
- US
- 10553522
- US
- 10553516
- US
- 10553432
- US
- 10490480
Top collaborators
LM
Luciana Meli
Senior Manager: Patterning & Metrology
JR
Jed Rankin
Photomask Supply and Development Strategy
AG
Allen Gabor
Distinguished Engineer